Laboratory Coating and Developing Tool for Semiconductor Processing

This procurement opportunity is for a 200 mm coating and developing track tool, specifically designed for use in the VTT Micronova cleanroom semiconductor front end. The tool will include a single cassette-to-cassette system with spin coating and developing stations, as well as hot and cool plates. It is intended to support the processing of silicon semiconductor wafers, facilitating exposure through a stepper or automated mask aligner. Suppliers must ensure that their proposals meet all technical specifications and performance criteria outlined in Annex 1 of the tender documents. Proposals that do not comply with these requirements may be rejected. The evaluation of tenders will be based solely on price, with a 100% weighting on cost. A reference price must be provided for equipment that meets all specified requirements. Note that partial tenders will not be accepted. Mandatory options to be offered include a maintenance contract and an additional warranty of 12 months, although VTT is not obligated to purchase these options. This is a new call for tenders, following the suspension of a previous procurement procedure, with updated requirements in Annex 1.